Micro Probe System (MPS) was recently adopted and introduced by Takeda Clean Room, The University of Tokyo, Ultrafine lithography nano-measurement Yoshio Mita Group, Platform Device Research Division, System Design Lab., School of Engineering. |
![](https://mtt-ins.co.jp/d/wp-content/uploads/2022/01/2022.01.31-0.-MPS-PT-835x1024.jpg)
2022/01/31
Micro Probe System (MPS) was recently adopted and introduced by Takeda Clean Room, The University of Tokyo, Ultrafine lithography nano-measurement Yoshio Mita Group, Platform Device Research Division, System Design Lab., School of Engineering. |